Holding apparatus and method for holding a substrate

ABSTRACT

A holding apparatus, in particular a chuck, for a substrate comprises a main body with a upper side, a carrier element arranged in a recess of the main body so as to be vertically movable such that it can be adjusted between a protruding loading position and a retracted clamping position, the carrier element comprising a support surface for placement of the substrate. The support surface has a smaller diameter than the main body. A lifting element lifts the carrier element to the loading position. The carrier element seals the recess such that a sealed cavity is provided between the main body and the carrier element, which cavity can have a negative pressure applied thereto which counteracts the effect of the lifting element.

CROSS-REFERENCE TO RELATED APPLICATIONS AND PRIORITY

This patent application claims priority from NL Patent Application No.2021006 filed May 29, 2018, which is herein incorporated by reference inits entirety.

FIELD OF THE INVENTION

The present invention relates to the field of holding and fixingsubstrates, in particular in manufacturing equipments for microstructuredevices.

BACKGROUND OF THE INVENTION

Substrates, such as semiconductor wafers, are processed in specialmanufacturing equipments for microstructure devices, e.g. in coatingequipments (coaters). In particular, substrate holders, so-calledchucks, are frequently used in order to hold the substrates in theseequipments. Frequently, they are spinner chucks which rotate thesubstrates at a high rotational speed, e.g. in order to coat thesubstrates uniformly. The substrates are fixed on the chuck, e.g. bymeans of vacuum suction.

The substrates processed in this manner are mostly flat and planar.However, they can also deviate from an ideally planar shape and have abow. Bowed wafers are defined e.g. as warped wafers. It is difficult tofix bent substrates on spinner chucks by means of vacuum suction becauseno vacuum or only an insufficient vacuum can be established between thechuck upper side and the substrate lower side on account of the bow.

In order to improve the fixing of bowed substrates, it is known toarrange soft sealing lips on the support surface of the chuck. Thesubstrate is supported on the periphery of the sealing lip so that avacuum can be established between the substrate and chuck.

However, in this case it is disadvantageous that the substrate is notguided horizontally during the suction process. When the air is beingevacuated, the substrate can laterally slide or float within the holdingsurface and a resulting vertical movement until finally it is supportedin a planar manner on the chuck. This adversely affects the centring ofthe substrate with respect to the chuck, which in the subsequent courseof the process can result in undesired effects, such as vibrations or anon-homogeneous, i.e. fluctuating along the periphery, edge bead removal(EBR).

Further disadvantages arise as a result of soiling and ageing of thesealing lips. The sealing lips can generate particles and change theirsurface and friction properties over time. This can result inspecifically increased maintenance outlay, e.g. arising from replacementof the sealing lips, correction of the storage position or cleaning ofthe sealing lips.

Therefore, it is the object of the present invention to hold and fix asubstrate, in particular a bowed substrate, efficiently and securely.

BRIEF DESCRIPTION OF THE INVENTION

This object is achieved by the features of the independent claims.Advantageous developments are the subject matter of the dependentclaims, the description and the drawings.

According to a first aspect, the invention relates to a holdingapparatus, in particular a chuck, for a substrate, comprising a mainbody with a upper side, a carrier element, wherein the carrier elementis arranged in a recess of the main body so as to be vertically movablesuch that it can be adjusted between a protruding loading position and aretracted clamping position, and wherein the carrier element comprises asupport surface for placement of the substrate, wherein the supportsurface has a smaller diameter than the main body, and a lifting elementwhich lifts the carrier element to the loading position, wherein thecarrier element seals the recess such that a sealed cavity is providedbetween the main body and the carrier element, which cavity can have anegative pressure applied thereto which counteracts the effect of thelifting element. This provides the advantage that substrates, to whichsuction cannot readily be applied, in particular bowed wafers (warpedwafers), can be held securely and guided in the vertical movement byreason of the initially small vacuum surface.

The small size of the support surface of the carrier element means thatin the loading position sufficient sealing can be achieved in order tofix a bowed wafer initially on the carrier element. Subsequently, thesubstrate can be pulled in the clamping position against the upper sideof the main body and finally can be firmly clamped.

The upper side of the main body can correspond to a clamping surface forthe substrate, on which the substrate is firmly clamped in the clampingposition.

In this case, a vertical movement refers to a movement coaxial to atransverse axis of the main body. In particular, this means a movementperpendicular to the support surface of the carrier element.

The diameter of the carrier element is e.g. less than half, a third or aquarter of the diameter of the substrate and/or the diameter of the mainbody. In particular, in the case of significantly bowed substrates, itis advantageous for the diameter of the carrier element to be as smallas possible in order to generate sufficient vacuum suction in theloading position.

The carrier element can be arranged so as to be movable in the recess inthe manner of piston.

The recess can be a depression in the main body, in particular along acentral axis of the main body. The recess can have a circular diameter.The diameter of the recess can correspond to, or can be minimally largerthan, the diameter of the carrier element.

The cavity can be the space which remains between the bottom of therecess and the carrier element. The size of cavity can be defined by theposition of the carrier element and can vary with the movement of thecarrier element.

The substrate can be a wafer. The substrate can be disk-shaped. Thesubstrate can have a largely round periphery with a diameter of 2, 3, 4,5, 6, 8, 12 or 18 inches. Furthermore, the substrate can be largely flatand can have a thickness between 50 and 4000 μm. The substrate can havea straight edge (flat) and/or can have at least one notch. Furthermore,the substrate can be angular, in particular square or rectangular.

The substrate can be formed from a semiconductor material, e.g. silicon(Si) or gallium arsenide (GaAs), a glass, e.g. quartz glass, a syntheticmaterial or a ceramic. The substrate can be formed from amonocrystalline, a polycrystalline or an amorphous material.Furthermore, the substrate can comprise a multiplicity of associatedmaterials.

The substrate can comprise electric circuits, e.g. transistors,light-emitting diodes or photodetectors, electric conductive trackswhich connect these circuits, or optical devices as well as MEMS orMOEMS structures. Furthermore, the substrate can have coatings, e.g.structured chromium layers, pre-cross-linked or hardened bond adhesivesor separation layers.

According to one embodiment, spacers are provided which define theclamping position of the carrier element in which the support surface ofthe carrier element is arranged substantially flush with the upper sideof the main body. This provides the advantage that the position of thecarrier element can be fixed in the clamping position such that thesupport surface and the upper side of the main body form a commonsupport for the substrate, on which the substrate can be clamped in theclamping position.

Preferably, a height deviation between the support surface of thecarrier element and the upper side of the main body after lowering isless than a height fluctuation of the substrate by reason of adeformation or bow. Particularly preferably, the height deviation isless than a substrate thickness.

According to one embodiment, the main body comprises a sealing means, inparticular a sealing lip, which surrounds the carrier element with aspaced interval and can seal between the upper side of the main body andthe substrate. This provides the advantage that in the clamping positionthe substrate can be subjected to suction and clamped in a particularlyefficient manner. With the aid of the sealing means, a vacuum can beproduced underneath the substrate which exerts a uniform force upon thesubstrate and clamps it.

According to one embodiment, the carrier element is provided with a sealwhich seals against the lateral wall of the recess in the main body.This provides the advantage that the sealing-tightness of the cavity andthe frictionless movement of the carrier element in the recess can beensured.

According to one embodiment, the carrier element comprises fixing meansfor fixing the substrate supported on the support surface, in particularsuction openings. This provides the advantage that the substrate can besecurely fixed on the support surface.

According to one embodiment, the main body has further fixing means forfixing the lowered substrate on the upper side. The further fixing meanscan comprise further suction openings.

According to one embodiment, the cavity and the fixing means arefluidically connected. This provides the advantage of permitting aparticularly simple construction and control of the holding apparatus.For example, an individual pressure supply is sufficient in order tocontrol the fixing of the substrate and the lowering of the carrierelement.

According to one embodiment, the holding apparatus has a pressureconnection, by means of which the pressure in the cavity can becontrolled. This provides the advantage of permitting control of thefunctions of the carrier element by means of the application ofpressure, e.g. via an external pressure supply.

According to one embodiment, the lifting element comprises a clampingelement, in particular a compression spring, which is designed to exerta force upon the carrier element in order to raise it.

The lifting element generates a force upon the carrier element, whichcounteracts the pulling force generated by the negative pressure in thecavity. The lifting element, in particular the clamping element, can bearranged between the main body and the carrier element, in particular inthe recess of the main body.

Furthermore, the holding apparatus can comprise a stop, wherein thelifting element is designed to urge the carrier element against thestop. The stop defines e.g. the loading position of the carrier elementand prevents the carrier element from sliding out of the recess.

According to one embodiment, the holding apparatus comprises a rotatingapparatus for rotating the holding apparatus, in particular the mainbody and the carrier element. This provides the advantage that asubstrate which is held particularly securely by the holding apparatuscan be rotated for further processing steps, such as the application ofcoatings.

According to a second aspect, the invention relates to a manufacturingequipment for microstructure devices, which comprises a holdingapparatus as claimed in any one of the preceding claims. This providesthe advantage that substrates, to which suction cannot readily beapplied, in particular bowed wafers (warped wafers), can be efficientlyand securely held and processed in the manufacturing equipment.

The manufacturing equipment can be a coater, a lacquerer, a developer, aspin dryer, a mask aligner, a projection scanner, a laser stepper, awafer bonder, a photomask system, a cleaning system or an imprintsystem.

According to a third aspect, the invention relates to a method forholding a substrate in a holding apparatus comprising a main body and acarrier element, wherein the method comprises the following methodsteps: raising the carrier element to a loading position, wherein thecarrier element has a smaller diameter than the substrate, placing thesubstrate onto a support surface of the carrier element, fixing thesubstrate on the support surface and lowering the carrier element to aclamping position in which the support surface of the carrier element isarranged substantially flush with an upper side of the main body. Thisprovides the advantage that substrates, to which suction cannot readilybe applied, in particular bowed wafers (warped wafers), can be heldsecurely and guided in the vertical movement by reason of the initiallysmall vacuum surface.

The diameter of the carrier element is e.g. less than half, a third or aquarter of the diameter of the substrate and/or the diameter of the mainbody. In particular, in the case of significantly bowed substrates, itis advantageous for the diameter of the carrier element to be as smallas possible in order to generate sufficient vacuum suction in theloading position.

The small diameter in comparison with the wafer size results in a vacuumsurface, which is initially smaller and easier to seal, to apply suctionto the wafer in the loading position. In particular, in the case of abowed wafer, the suction is simplified by the smaller vacuum surface.Subsequently, the substrate is pulled against the upper side of the mainbody where finally it can be firmly clamped over its entire surface inthe clamping position.

According to one embodiment, in order to fix the substrate on thesupport surface a first negative pressure is applied to a cavity of theholding apparatus, and in order to lower the carrier element to theclamping position a second negative pressure is applied to the cavity,wherein the second negative pressure is a lower pressure than the firstnegative pressure. This provides the advantage that the control of theholding apparatus, in particular the fixing of the substrate and themovement of the carrier element, can be effected by means of a singlepressure connection. By virtue of the change in the negative pressure,the substrate can initially be preliminarily fixed, then the carrierelement can be adjusted and then the substrate can be finally fixed.

According to one embodiment, the placing of the substrate onto thesupport surface of the carrier element produces a pressure reduction inthe cavity, in particular by means of the sealing of suction openings onthe support surface, wherein the lowering of the carrier element to theclamping position is triggered and/or assisted by the pressurereduction. This provides the advantage of permitting particularly simplecontrol of the holding apparatus because in particular a manual changein pressure is no longer required in order to lower the carrier element.

For example, in order to fix the substrate on the support surface thefirst negative pressure is initially applied to the cavity of theholding apparatus, and then the second negative pressure is applied inthe cavity after the substrate is placed onto the carrier element, e.g.by the covering of suction openings on the support surface by thesubstrate.

According to one embodiment, the carrier element urges the substrate inthe clamping position against the upper side of the main body, wherein aforce exerted upon the substrate is of such a magnitude that possiblebowing of the substrate is reduced. This provides the advantage that thebowed substrates can be smoothed out by the holding apparatus. As aresult, further processing of the substrate, e.g. the application of acoating, can be simplified or even permitted. Furthermore, asmoothed-out substrate can be held in a more stable manner, inparticular during rotation of the chuck.

The bowed substrate can be a so-called warped wafer. The bow can occurby reason of a smaller thickness of the substrate and/or by reason ofinternal stresses in the substrate.

According to one embodiment, the substrate is pulled against the upperside of the main body by means of a negative pressure acting between thesubstrate and the upper side. This provides the advantage that thesubstrate in the clamping position can be securely and firmly fixed onthe upper side.

According to one embodiment, the method further comprises rotating thesubstrate, in particular after lowering the carrier element. Thisprovides the advantage that the substrate which is held particularlysecurely in this manner can be rotated for further processing steps.

BRIEF DESCRIPTION OF THE DRAWINGS

Further exemplified embodiments are explained in greater detail withreference to the accompanying drawings. In the figures:

FIG. 1 shows a schematic view of a holding apparatus for a substrate;

FIG. 2a -FIG. 2d shows schematic views of a holding apparatus duringplacement of a substrate;

FIG. 3 shows a schematic view of a manufacturing equipment formicrostructure devices with a holding apparatus; and

FIG. 4 shows a flow diagram of a method for holding a substrate in aholding apparatus.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 shows a schematic view of a holding apparatus 100 for a substrate101 according to one embodiment.

The holding apparatus 100 comprises a main body 103 having an upper side105, a carrier element 107 which is arranged in a recess 109 of the mainbody 103 so as to be vertically movable such that it can be adjustedbetween a protruding loading position and a retracted clamping position,wherein the carrier element 107 comprises a support surface 111 forplacement of the substrate 101, wherein the support surface 111 has asmaller diameter than the main body 103. Furthermore, the holdingapparatus 100 comprises a lifting element which raises the carrierelement 107 to the loading position.

The carrier element 107 seals the recess 109 such that a sealed cavity113 is provided between the main body 103 and the carrier element 107,which cavity can have a negative pressure applied thereto whichcounteracts the effect of the lifting element.

The upper side 105 of the main body 103 can correspond to a clampingsurface for the substrate 101, on which the substrate 101 is firmlyclamped in the clamping position.

The carrier element 107 can be received in the recess 109 in such amanner as to be adjustable in the manner of a piston. By applying anegative pressure to the sealed cavity, the carrier element 107 can bemoved from the loading position to the clamping position.

The cavity is the space which remains between the bottom of the recess109 and the carrier element 101. Therefore, the size of the cavity canbe changed with the position of the carrier element 101 and is dependentthereupon.

In an alternative embodiment, the cavity 113 can also be formed byfurther bores or fluid lines in the main body 103.

In the embodiment shown, the lifting element is formed by two clampingelements 115 a, 115 b in the form of compression springs which arearranged in the recess 109 of the main body 103, and exert a pushingforce upon the carrier element.

In the embodiment shown in FIG. 1, a sealing means 119 is arranged onthe surface of the main body. The sealing means 119 can improve vacuumsuction of the substrate 101 on the support surface 111 and/or theupper-side surface 105 of the main body 103 in the clamping position. Inparticular, the sealing means 119 enables a vacuum to be establishedover a large surface between the substrate 101 and the holding apparatus100.

The substrate 101 can be a wafer. The substrate 101 can be disk-shaped.The substrate 101 can have a largely round periphery with a diameter of2, 3, 4, 5, 6, 8, 12 or 18 inches. Furthermore, the substrate 101 can belargely flat and can have a thickness between 50 and 4000 μm. Thesubstrate 101 can have a straight edge (flat) and/or can have at leastone notch. Furthermore, the substrate 101 can be angular, in particularsquare or rectangular.

The substrate 101 can be formed from a semiconductor material, e.g.silicon (Si) or gallium arsenide (GaAs), a glass, e.g. quartz glass, asynthetic material or a ceramic. The substrate can be formed from amonocrystalline, a polycrystalline or an amorphous material.Furthermore, the substrate 101 can comprise a multiplicity of associatedmaterials.

The substrate 101 can comprise electric circuits, e.g. transistors,light-emitting diodes or photodetectors, electric conductive trackswhich connect these circuits, or optical devices as well as MEMS orMOEMS structures. Furthermore, the substrate 101 can have coatings, e.g.structured chromium layers, pre-cross-linked or hardened bond adhesivesor separation layers.

Furthermore, the holding apparatus 100 comprises a seal 125 which sealsagainst the lateral wall of the recess 109 in the main body 103. Theseal 125 can be an O-ring or a sealing lip.

Furthermore, the carrier element 107 has spacers 117 a, 117 b, e.g. inthe form of pins, on its lower side.

The spacers 117 a, 117 b can be used to define a lowering depth of thecarrier element 107 into the recess 109 and to ensure that the supportsurface 111 of the carrier element 107 in the clamping position isarranged substantially flush with the upper side 105 of the main body103. Furthermore, the spacers 117 a, 117 b can prevent the carrierelement 107 from being lowered completely into the recess and thusensure a minimum size of the cavity 113.

In the embodiment shown in FIG. 1, the carrier element 107 also hasfixing means 123 a, 123 b for fixing the substrate supported on thesupport surface. The fixing means 123 a, 123 b can be suction openings.Furthermore, the fixing means 123 a, 123 b can comprise a vacuum bore orvacuum grooves.

The main body 103 comprises a fluid channel 121 for applying pressure tothe cavity 113.

The fluid channel 121 can be a bore, in particular a central bore, inthe main body 113 which issues in the recess 109 or the cavity 113formed by the recess 109.

According to one embodiment, the holding apparatus 100 has a pressureconnection, not shown in FIG. 1, by means of which the pressure in thecavity 113 can be controlled. The fluid channel 121 can connect thecavity 113 fluidically to the pressure connection. When the negativepressure is applied to the cavity 113, the cavity consequently also liesagainst the fixing means 123 a, 123 b, whereby said fixing means canapply suction to the substrate 101.

Furthermore, the holding apparatus 100 can comprises a stop, againstwhich the carrier element 107 is urged in the loading position.Therefore, the stop can be used to define the position of the carrierelement 107 in the loading position. The stop can be used, as it were,to prevent the carrier element 107 from sliding out of the recess 109.

FIG. 2a -FIG. 2d shows schematic views of the holding apparatus 100during placement of a substrate 101 according to a further embodiment.

The carrier element 107 of the holding apparatus 100 in FIG. 2a -FIG. 2dcomprises four suction openings 201 a, 201 b, 201 c, 201 d. The suctionopenings 201 a, 201 b, 201 c, 201 d form the fixing means for fixing thesubstrate 101 on the support surface 111.

The suction openings 201 a, 201 b, 201 c, 201 d are connectedfluidically to the cavity 113 via a fluid channel 203.

The holding apparatus 100 in FIG. 2a -FIG. 2d can comprise a rotatingapparatus, not shown. In particular, the holding apparatus 100 is aspinner chuck, in which a vacuum is maintained in a hollow shaft of themotor with respect to the chuck 100 or with respect to the cavity 103 inorder, on the one hand, to apply suction to the substrate 101 and, onthe other hand, to adjust the position of the carrier element 107.

FIG. 2a shows the holding apparatus 100 in the loading position prior toplacement of the substrate 101.

The vertically movable carrier element 107 is raised by the compressionsprings 115 a-b and is urged against a stop, not shown.

A first negative pressure P1 is applied to the cavity 113, thusproducing a low vacuum in the cavity 113. The resulting force is toosmall in order to compress the compression springs 115 a-b so that thecarrier element 107 continues to lie against the stop and protrudebeyond the upper side 105 of the main body 103.

Moreover, by reason of the fluidic connection of the suction openings201 a, 201 b, 201 c, 201 d to the cavity 113 air can be drawn into thecavity 113 which, in addition, can prevent an excessively strong vacuumfrom being produced in the cavity 113.

FIG. 2b shows the substrate 101 being placed onto the support surface111 of carrier element 107.

Suction is applied to the substrate 101 through the suction openings 201a, 201 b, 201 c, 201 d on the support surface 111 and the substrate isfixed thereon. At the same time, the substrate 101 covers the suctionopenings 201 a, 201 b, 201 c, 201 d.

Covering the suction openings 201 a, 201 b, 201 c, 201 d prevents e.g.air from the surrounding area entering into the cavity 113. This caneffect an additional pressure reduction in the cavity 113 in which asecond negative pressure P2 is thus present, wherein P2<P1.

In an alternative embodiment, the second negative pressure P2 can alsobe adjusted manually after the substrate 101 has been placed, e.g. bymeans of a pressure connection on the chuck 100.

FIG. 2c shows the carrier element 107 being lowered to the clampingposition after placement of the substrate 101.

The carrier element 107 is lowered by reason of the pressure reductionin the cavity 113. The pulling force exerted upon the carrier element107 by the negative pressure P2 in the cavity 113 outweighs the pushingforce exerted by the clamping elements 115 a, 115 b upon the carrierelement 107. As a consequence, the clamping elements 115 a, 115 b arecompressed.

The carrier element 107 is lowered into the recess 109 to such an extentthat the support surface 111 is arranged approximately flush with theupper side 105 of the main body 103, and the substrate 101 lies not onlyon the support surface 111 but also on the upper side 105. The maximumlowering depth of the carrier element 107 is determined by the spacers117 a, 117 b.

The support surface 111 and the upper side 105 form, in the clampingposition, a common clamping surface for the substrate 101. In theembodiment shown in FIG. 2a -FIG. 2d , the diameter of the main body 103corresponds to the diameter of the substrate so that the substrate issupported with its complete rear side on the upper side 105 and thesupport surface 111.

Alternatively, the main body 103 can also have a larger diameter thanthe substrate or, as shown in FIG. 1, can have a smaller diameter thanthe substrate 101. Therefore, the holding apparatus 100 can also be usedfor particularly small or particularly large substrates 101.

FIG. 2 shows the substrate 101 being treated after the carrier element107 has been lowered.

During the treatment, the substrate 101 is rotated, e.g. by a rotatingapparatus, not shown, which causes the main body 103 and the carrierelement 107 to rotate.

To this end, the main body 103 can be mounted in a rotatable manner in arigid holding element of the holding apparatus 100. In particular, theholding apparatus 100 is designed as a spin chuck.

In addition to the suction openings 201 a, 201 b, 201 c, 201 d shown inFIG. 2a -FIG. 2d , the main body 103 can have further fixing means forfixing or clamping the lowered substrate 101 on the upper side 105. Thefurther fixing means can comprise further suction openings.

Furthermore, FIG. 2d shows an application apparatus 205, by means ofwhich a fluid can be applied to the rotating substrate. The fluid ise.g. a lacquer, in particular a photoresist, a coating liquid, acleaning liquid or a solvent.

In an alternative embodiment, the sealing means 119 shown in FIG. 2a-FIG. 2d , e.g. a sealing lip, can be omitted. In the clamping position,the substrate 101 then comes directly into contact with the upper side105 of the main body 103. This provides the advantage that maintenanceoutlay is reduced because the sealing lips no longer have to beregularly replaced and the sealing lips no longer have to be cleaned.Furthermore, possible floating of the substrate 101 as it is beingdeposited on the sealing lips is avoided.

Furthermore, the movable carrier element 100 can replace lifting pinsfor transferring the substrate 101 to an end effector, as used in knownchucks. In order to deposit the substrate on the holding apparatus 100or in order to then pick it up from the holding apparatus 100, thecarrier element 107 can raise the substrate which means that noadditional lifting pins are required.

In an alternative embodiment, the main body 103 comprises furtherapplication openings and/or nozzles for fluids which are arranged e.g.on the upper side 105 of the main body.

By means of these further application openings on the upper side 105, afluid can be applied to a rear side of the substrate 101 if, as shown inFIG. 2b , the holding apparatus 100 is located in the loading positionand the substrate 101 is supported on the carrier element 107.

The fluid can be applied to a surface on the rear side of the substrate101 which is not covered by the carrier element 107. This provides theadvantage that coating or cleaning or solvent treatment of the substraterear side is permitted without the substrate 101 having to be liftedfrom the holding apparatus 100 and turned.

FIG. 3 shows a manufacturing equipment 300 for microstructure devicescomprising a holding apparatus 100 according to one embodiment.

The manufacturing equipment 300 can be a coater, a lacquerer, adeveloper, a spin dryer, a mask aligner, a projection scanner, a laserstepper, a wafer bonder, a photomask system, a cleaning system or animprint system.

The holding apparatus 100 can correspond to the holding apparatus 100shown in FIG. 1 and/or FIG. 2a -FIG. 2d . The holding apparatus 100 canbe connected to a pressure supply of the manufacturing equipment 300.

Furthermore, FIG. 3 shows a robot arm 301 comprising an end effector303, on which a substrate 101 is supported. By means of this robot arm301, the substrate 101 can be placed onto the holding apparatus 100,wherein the carrier element is raised during placement of the substrate101.

FIG. 4 shows a flow diagram of a method 400 for holding the substrate101 in the holding apparatus 100 according to one embodiment.

The substrate 101 can be a glass or semiconductor substrate.Furthermore, the substrate 101 can be a wafer or a mask. The substrate101 can correspond to the substrate 101 shown in FIG. 1, FIG. 2a -FIG.2d and/or FIG. 3.

The method 400 can be performed with the holding apparatus 100 of FIG. 1and/or FIG. 2a -FIG. 2d , and comprises raising 401 the carrier element107 to the loading position, wherein the carrier element 107 has asmaller diameter than the substrate 100, placing 403 the substrate 101onto the support surface 111 of the carrier element 107, fixing 405 thesubstrate 101 on the support surface 111, and lowering 407 the carrierelement 107 to the clamping position.

In the clamping position, the support surface 111 of the carrier element107 is arranged substantially flush with the upper side 105 of the mainbody 103.

The substrate 101 can have a bow or deformation or can be very flexible.The bowed substrate 101 can be a so-called warped wafer.

The smaller diameter of the carrier element 107 in comparison with thesubstrate 101 ensures that suction can be applied more easily inparticular to bowed substrates 101 than with a large-surface chuckbecause the size of the vacuum surface underneath the substrate 101 issmaller.

According to one embodiment, in order to fix 405 the substrate 101 onthe support surface 111 a first negative pressure is applied to thecavity 113 of the holding apparatus 100, and in order to lower thecarrier element 107 to the clamping position a second negative pressureis applied to the cavity 113, wherein the second negative pressure is alower pressure than the first negative pressure.

The application of the negative pressure to the cavity 113 causes apulling force to be produced which counteracts a pushing force of thelifting element. The lifting element is adjusted in such a manner thatthe pulling force exerted upon the carrier element 107 exceeds thepushing force of the lifting element during application of the secondnegative pressure. As a consequence, the carrier element 107 is lowered.

The negative pressure can be applied via an external pressure supply toa pressure connection of the holding apparatus.

In an alternative embodiment, in order to fix 405 the substrate on thesupport surface 111 the first negative pressure is applied to the cavity113 of the holding apparatus 100, and the second negative pressure isapplied in the cavity 113 after the substrate 101 is placed onto thecarrier element 107, e.g. by the covering of suction openings 201 a-d onthe support surface 111 by the substrate 101.

In the clamping position, the substrate 101 can be additionally pulledand/or fixed against the upper side 105 of the main body 103 by anegative pressure acting between the substrate 101 and the upper side105.

According to one embodiment, the carrier element 107 can urge a bowed ordeformed substrate 101 in the clamping position against an upper side105 of the main body 103 such that a force exerted upon the substrate101 is so great that the bowing or deformation of the substrate 101 isreduced.

The substrate can be smoothed out and/or clamped by means of the forceexerted in this manner.

Furthermore, the method 400 can comprise rotating the substrate 101, inparticular after lowering 407 the carrier element 107 to the clampingposition.

After lowering the substrate 101, the substrate 101 can be processed ortreated, e.g. a coating can be applied to the rotating substrate.

The lowering 407 of the substrate 101 can be performed a predeterminedtime after placing 403 the substrate 101 or immediately after placingthe substrate 101, e.g. depending upon pre-set process parameters.

In a manufacturing equipment 300, the mode of operation of the holdingapparatus 100 is controlled e.g. by means of a process module.

When transferring a warped wafer from a substrate handler (robot, axlewith end effector, etc.) to the holding apparatus 100, the processmodule signals e.g. to a substrate handler the reception of thesubstrate on the “Z-chuck” (carrier element 107) which has been liftedout, whereupon the holding vacuum is deactivated on the substratehandler. Therefore, a transfer error from the substrate handler to theholding apparatus 100 can be minimised.

As the carrier element 107 with the bowed substrate 101 is beinglowered, the substrate is centred and guided. Lateral slippage orfloating is no longer possible. A sealing lip 119 in the outer region ofthe holding apparatus 100, e.g. on the upper side 105 of the main body105, can come into contact with the substrate 101 during the loweringprocedure so that a large-surface vacuum is established underneath thesubstrate and the substrate 101 is pulled two-dimensionally in a planarmanner.

The invention claimed is:
 1. A holding apparatus for a substrate,comprising: a main body comprising an upper side, a carrier element,wherein the carrier element is arranged in a recess of the main body soas to be vertically movable, wherein the carrier element is adjustablebetween a protruding loading position and a retracted clamping position,and wherein the carrier element comprises a support surface forplacement of the substrate, wherein the support surface has a smallerdiameter than the main body, and a lifting element which raises thecarrier element to the loading position, wherein the carrier elementseals the recess such that a sealed cavity is provided between the mainbody and the carrier element, which cavity can have a negative pressureapplied thereto which counteracts the effect of the lifting element,wherein spacers are provided which define the retracted clampingposition of the carrier element in which the support surface of thecarrier element is arranged flush with the upper side of the main body,and wherein the spacers are arranged in parallel to the lifting element.2. The holding apparatus of claim 1 wherein the main body has a sealingmeans which surrounds the carrier element with a spaced interval and canseal between the upper side of the main body and the substrate.
 3. Theholding apparatus as of claim 1 wherein the carrier element is providedwith a seal which seals against the lateral wall of the recess in themain body.
 4. The holding apparatus of claim 1 wherein the carrierelement comprises fixing means for fixing the substrate supported on thesupport surface.
 5. The holding apparatus of claim 4 wherein the cavityand the fixing means are fluidically connected.
 6. The holding apparatusof claim 1 wherein the holding apparatus comprises a pressureconnection, whereby the pressure in the cavity is controllable.
 7. Theholding apparatus of claim 1 wherein the lifting element comprises aclamping element which is configured to exert a force upon the carrierelement in order to raise it.
 8. The holding apparatus of claim 1wherein the holding apparatus comprises a rotating apparatus forrotating the holding apparatus.
 9. A manufacturing equipment formicrostructure devices which comprises a holding apparatus for asubstrate, comprising: a main body comprising an upper side, a carrierelement, wherein the carrier element is arranged in a recess of the mainbody so as to be vertically movable, wherein the carrier element isadjustable between a protruding loading position and a retractedclamping position, and wherein the carrier element comprises a supportsurface for placement of the substrate, wherein the support surface hasa smaller diameter than the main body, and a lifting element whichraises the carrier element to the loading position, wherein the carrierelement seals the recess such that a sealed cavity is provided betweenthe main body and the carrier element, which cavity can have a negativepressure applied thereto which counteracts the effect of the liftingelement, wherein spacers are provided which define the retractedclamping position of the carrier element in which the support surface ofthe carrier element is arranged flush with the upper side of the mainbody, and wherein the spacers are co-planar with the lifting element.10. A holding apparatus for a substrate, comprising: a main bodycomprising an upper side, a carrier element, wherein the carrier elementis arranged in a recess of the main body so as to be vertically movable,wherein the carrier element is adjustable between a protruding loadingposition and a retracted clamping position, and wherein the carrierelement comprises a support surface for placement of the substrate,wherein the support surface has a smaller diameter than the main body,and a lifting element which raises the carrier element to the loadingposition, wherein the carrier element seals the recess such that asealed cavity is provided between the main body and the carrier element,which cavity can have a negative pressure applied thereto whichcounteracts the effect of the lifting element, wherein spacers areprovided which define the retracted clamping position of the carrierelement in which the support surface of the carrier element is arrangedflush with the upper side of the main body, and wherein the spacers arespaced apart from said springs and located between the springs locatedat the bottom surface of the carrier element within the recess of thebody.
 11. A holding apparatus for a substrate, comprising: a main bodycomprising an upper side, a carrier element, wherein the carrier elementis arranged in a recess of the main body so as to be vertically movable,wherein the carrier element is adjustable between a protruding loadingposition and a retracted clamping position, and wherein the carrierelement comprises a support surface for placement of the substrate,wherein the support surface has a smaller diameter than the main body,and a lifting element which raises the carrier element to the loadingposition, wherein the carrier element seals the recess such that asealed cavity is provided between the main body and the carrier element,which cavity can have a negative pressure applied thereto whichcounteracts the effect of the lifting element, wherein spacers areprovided which define the retracted clamping position of the carrierelement in which the support surface of the carrier element is arrangedflush with the upper side of the main body, and wherein the carrierelement comprises fixing means for fixing the substrate supported on thesupport surface and the cavity and the fixing means are fluidicallyconnected.
 12. A holding apparatus for a substrate, comprising: a mainbody comprising an upper side, a carrier element, wherein the carrierelement is arranged in a recess of the main body so as to be verticallymovable, wherein the carrier element is adjustable between a protrudingloading position and a retracted clamping position, and wherein thecarrier element comprises a support surface for placement of thesubstrate, wherein the support surface has a smaller diameter than themain body, and a lifting element which raises the carrier element to theloading position, wherein the carrier element seals the recess such thata sealed cavity is provided between the main body and the carrierelement, which cavity can have a negative pressure applied thereto whichcounteracts the effect of the lifting element, wherein spacers areprovided which define the retracted clamping position of the carrierelement in which the support surface of the carrier element is arrangedflush with the upper side of the main body, and wherein the holdingapparatus comprises a rotating apparatus for rotating the holdingapparatus.